Experimental characterisation of a piezoelectrically actuated force amplifier using optical and self-sensing methods
Conference: ACTUATOR 2022 - International Conference and Exhibition on New Actuator Systems and Applications
06/29/2022 - 06/30/2022 at Mannheim
Proceedings: GMM-Fb. 101: ACTUATOR 2022
Pages: 4Language: englishTyp: PDF
Authors:
Mueller, Sonja (Furtwangen University, Institute for Microsystems Technology (iMST), Furtwangen, Germany & University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany)
Rupitsch, Stefan J. (University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany)
Mescheder, Ulrich (Furtwangen University, Institute for Microsystems Technology (iMST), Furtwangen, Germany)
Abstract:
In this work, we characterise a flexural mechanical amplifier, which is used for the realisation of a miniaturised piezoelectric inchworm motor designed for large force (some N) and stroke (tens of mm) operation as it is required e.g., for medical implants. The characterisation is based on high precision optical displacement measurements and a force self-sensing approach. An optically measured displacement of 292 nm in lateral direction and 910 nm in vertical direction of the flexural mechanical amplifier has been obtained, corresponding to a deflection attenuation factor of 3.1. Piezoelectric self-sensing of force was used to determine a force amplification factor of 3.43 from the mechanical oval structure.