Modelling and investigation of the temperature drift of tactile piezoresistive silicon force- and deflection nanosensors

Conference: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10/10/2005 - 10/12/2005 at Munich, Germany

Proceedings: Mikrosystemtechnik Kongress 2005

Pages: 4Language: englishTyp: PDF

Personal VDE Members are entitled to a 10% discount on this title

Nesterov, Vladimir; Doering, Lutz; Brand, Uwe (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany)
Peiner, Erwin (Institute for Semiconductor Technology, Technical University Braunschweig, Germany)
Büttgenbach, Stephanus (Institute for Microtechnology, Technical University Braunschweig, Germany)

A non-destructive method to determine the thermal drift of piezoresistive sensors is described. Input quantities of the model are the measured piezoresistors and their length and width. Output quantities are the doping concentration and the temperature coefficient of resistivity of each resistor.