3D-Mikro-Components beyond Ultra-Precision Engineering

Conference: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10/10/2005 - 10/12/2005 at Munich, Germany

Proceedings: Mikrosystemtechnik Kongress 2005

Pages: 4Language: englishTyp: PDF

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Detemple, Peter; Schmitt, Stefan; Haase, Frank; Doll, Theodor (Institut für Mikrotechnik Mainz GmbH, Carl-Zeiss-Str. 18-20, 55129 Mainz, Germany)

Advanced silicon micromachining allows the realization of micro structured parts that exhibit structural dimensions and tolerances far beyond the abilities of ultra-precision engineering. In particular in combination with methods of thin film technology they are a versatile tool for the manufacturing of customer-specific sensors, micro components and subsystems for various fields of application. Using silicon structures as a master for the realization of metal mold inserts the fabrication of micro components from plastics becomes feasible.