Floating Gate Field Effect Devices (FGFET) for Gas Sensing

Conference: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10/10/2005 - 10/12/2005 at Munich, Germany

Proceedings: Mikrosystemtechnik Kongress 2005

Pages: 4Language: englishTyp: PDF

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Eisele, I.; Sulima, T. (Institute of Physics, Universität der Bundeswehr München, 85577 Neubiberg, Germany)

The concept of a floating gate field effect device (FGFET) for gas detection is presented. The signal evaluation allows temperature independent measurements with multi sensor arrays. Due to the principle of operation chemically sensitive materials independent of their electrical properties can be chosen. Some examples are given.