Laser Processing of Materials in Micro System Technology
Conference: Mikrosystemtechnik Kongress 2005 - Mikrosystemtechnik Kongress 2005
10/10/2005 - 10/12/2005 at Munich, Germany
Proceedings: Mikrosystemtechnik Kongress 2005
Pages: 4Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Schoonderbeek, A.; Bärsch, N.; Klug, U.; Otte, F.; Siegel, F.; Stute, U. (Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany)
Lasers are used as a tool in many Micro System Technology production processes. This paper gives an impression of laser micro-machining in this field. Both, theoretical backgrounds and applications are discussed, with a concentration on laser processing of silicon. Different types of lasers, used for the applications mentioned in this paper, are compared with each other. These types of lasers are characterized by the pulse duration, which is respectively in the nano-, pico- and femtosecond range.