Integrated Si3N4/SiO2 Slot-Waveguide Microresonators

Conference: ECOC 2007 - 33rd European Conference and Exhibition of Optical Communication
09/16/2007 - 09/20/2007 at Berlin, Germany

Proceedings: ECOC 2007

Pages: 2Language: englishTyp: PDF

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Barrios, C. A. (ISOM, Universidad Politcnica de Madrid, ETSI Telecomunicacin, Ciudad Universitaria s/n, Madrid, Spain)
Gylfason, K. B.; Sohlstrm, H. (Microsystem Technology Laboratory, School of Electrical Engineering, KTH- Royal Institute of Technology, Osquldas vg. 10, SE-10044, Stockholm, Sweden)
Snchez, B.; Griol, A. (NTC, Universidad Politcnica de Valencia, Edificio IDI-5, Camino de Vera s/n, Valencia, Spain)
Casquel, R.; Holgado, M. (Centro Lser, Universidad Politcnica de Madrid, Carretera de Valencia km7 300, Madrid, Spain)

We demonstrate slot-waveguide microring resonators and Fabry-Perot microcavities on Si3N4/SiO2. Characterization indicates guiding and confinement in the waveguide nanometric-size low-index slot region at Oband (1260-1370nm) wavelengths. We measured propagation losses <20 dB/cm.