Thin Film InGaAs/InAlAs Photodetectors Integrated on a Silicon-on- Insulator Waveguide Substrate

Conference: ECOC 2007 - 33rd European Conference and Exhibition of Optical Communication
09/16/2007 - 09/20/2007 at Berlin, Germany

Proceedings: ECOC 2007

Pages: 2Language: englishTyp: PDF

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Brouckaert, Joost; Roelkens, Gunther; Thourhout, Dries Van; Baets, Roel (Ghent University IMEC, Department of Information Technology, St. Pietersnieuwstraat 41, 9000 Gent, Belgium)

We present compact and efficient InGaAs/InAlAs metal-semiconductor-metal photodetectors coupled with Silicon-on-Insulator waveguides. The responsivity of 25micrometer long detectors is 1.0A/W at a wavelength of 1.55micrometer. The dark current is 3.0nA at 5V bias.