Low loss amorphous silicon photonic wire and ring resonator fabricated by CMOS process

Conference: ECOC 2007 - 33rd European Conference and Exhibition of Optical Communication - Post-Deadline Papers
09/16/2007 - 09/20/2007 at Berlin, Germany

Proceedings: ECOC 2007

Pages: 2Language: englishTyp: PDF

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Selvaraja, Shankar Kumar; Bogaerts, Wim; Dumon, Pieter; Thourhout, Dries Van; Baets, Roel (Photonic research group-IMEC, University of Gent, Gent, Belgium)
Sleeckx, Erik; Schaekers, Marc; Schaekers, Marc (IMEC, Leuven, Belgium)

We report low loss amorphous photonic wire loss of 3.5dB/cm. We also report compact racetrack ring resonators with Q factor greater than 20,000. The photonic circuit is fabricated with standard CMOS production tools.