Generation of Multi-Energy Domain Macromodels of Highly Perforated and Deformable Microstructures Exposed to Squeeze Film Damping

Conference: MikroSystemTechnik - KONGRESS 2007
10/15/2007 - 10/17/2007 at Dresden, Germany

Proceedings: MikroSystemTechnik

Pages: 4Language: englishTyp: PDF

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Niessner, Martin; Schrag, Gabriele; Wachutka, Gerhard (Munich University of Technology, Munich, Germany)

We present a methodology to set up computationally efficient multi-energy domain macromodels of microdevices exposed to squeeze film damping. The basis of our concept is a physically based mixed-level representation of the structural parts of a microdevice which provides the proper framework to couple the mechanical, electrical and fluidic domain as part of a Kirchhoffian network. Applying a special node lumping technique to the fluidic subnetwork describing the viscous damping effects, a considerable reduction of the fluidic network variables can be achieved. This enables fast, but yet accurate design studies of microdevices with complex geometry such as highly perforated plates or diaphragms. All underlying algorithms are implemented in MATLAB toolbox and, thus, easily accessible for practical use.