Doms, M.; Feindt, H.; Salvador, A.; Brinkhues, S.; Shewtanasoontorn, D.; Müller, J. (Technische Universität Hamburg-Harburg, Institut für Mikrosystemtechnik, Deutschland)
Different kinds of thin-film coatings were investigated with regard to their applicability as hydrophobic coatings for MEMS. The films were deposited onto silicon and borosilicate glass substrates by spincoating of DyneonTM PTFE and PFA, plasmapolymerization of HMDS-N and C4F8 as well as liquid-phase and vapor-phase coating of SAMs from DDMS, FDTS, FOTS and Geleste AquaphobeTM CM. The layer properties were analyzed using profilometry, FTIR, SEM and contact angle measurements. The influence of various deposition parameters on the properties of the films was investigated. As these layers can be used in microfluidic systems, as waterrepellent layers and as anti-stiction coatings, they are suited for versatile fields of application.