Batch Fabrication Methods for Active Polymer Microsystems
Conference: Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components
04/09/2008 - 04/10/2008 at Barcelona, Spain
Proceedings: Smart Systems Integration 2008
Pages: 3Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Grund, Thomas; Kohl, Manfred (Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik, Postfach 3640, 76021 Karlsruhe, Germany)
A batch compatible process flow to overcome the costly piece by piece assembly of hybrid microsystems is shown. As demonstrator device, a shape memory alloy (SMA) actuated polymer microvalve is introduced. The valve concept, fabrication technologies and device characteristics are discussed.