Tunable bio-doped sol-gel glasses for the fabrication of photonic sensors

Conference: Smart Systems Integration 2008 - 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components
04/09/2008 - 04/10/2008 at Barcelona, Spain

Proceedings: Smart Systems Integration 2008

Pages: 3Language: englishTyp: PDF

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Fernández-Sánchez, César; Cadarso, Victor J.; Domínguez, Carlos; Llobera, Andreu (Instituto de Microelectrónica de Barcelona. CNM-IMB (CSIC). Campus Universitat Autónoma de Barcelona, 08193, Bellaterra, Spain)
Darder, Margarita (Instituto de Ciencia de Materiales de Madrid, CSIC. Cantoblanco, 28049, Madrid, Spain)

Organic-inorganic silicon-based polymers can be tailor made in order to get materials with mechanical, chemical, optical or electric properties that suit a great variety of applications and are compatible with microfabrication technologies1. Herein, this work reports on the one-step processing of photonic microstructures of a sol-gel polymeric material on flat substrates by two different soft lithography techniques, microtransfer molding (μ-TM) and micromolding in capillaries (MIMIC).