Ultra High Voltage High Current Probe for Power Device Testing

Conference: PCIM Europe 2014 - International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management
05/20/2014 - 05/22/2014 at Nürnberg, Deutschland

Proceedings: PCIM Europe 2014

Pages: 8Language: englishTyp: PDF

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Negishi, Kazuki (Cascade Microtech, Inc. USA)

On-wafer power device probing is a very challenging task, which requires probes that can endure high-current and high-voltage conditions, minimize pad damage and contact resistance on the DUT pads, and achieve over-temperature probing. Cascade Microtech recently developed a 10 kV / 300 A probe for on-wafer power device probing.