Ultra High Voltage High Current Probe for Power Device Testing
Conference: PCIM Europe 2014 - International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management
05/20/2014 - 05/22/2014 at Nürnberg, Deutschland
Proceedings: PCIM Europe 2014
Pages: 8Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Negishi, Kazuki (Cascade Microtech, Inc. USA)
On-wafer power device probing is a very challenging task, which requires probes that can endure high-current and high-voltage conditions, minimize pad damage and contact resistance on the DUT pads, and achieve over-temperature probing. Cascade Microtech recently developed a 10 kV / 300 A probe for on-wafer power device probing.