Plasma Dicing Technology And Total Process
Conference: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
04/10/2019 - 04/11/2019 at Barcelona, Spain
Proceedings: SmartSystems Integration
Pages: 6Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Weber, James; Sasaguri, Shinji (Panasonic Industry Europe GmbH, Microelectronics, Ottobrunn, Germany)
Plasma dicing is becoming increasingly attractive in the semiconductor market. Dies are becoming smaller and thinner and manufacturers are facing difficulties such as increasing material loss due to the width of the dicing line, mechanical damage to the dies from chipping and increasingly longer processing times due to line by line mechanical dicing. Panasonic’s APX300 Plasma Dicer solves these challenges and simultaneously provides a higher quality product with a lower cost of production.