Increasing piezo micro diaphragm pump performance by optimizing piezo actuation

Conference: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
04/10/2019 - 04/11/2019 at Barcelona, Spain

Proceedings: SmartSystems Integration

Pages: 4Language: englishTyp: PDF

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Bussmann, Agnes.; Grünerbel, L. (Fraunhofer EMFT, Hansastr. 27d, 80686 Munich, Germany)

Actuation of piezo ceramics applies only up to 30% of their negative coercive field strength Ec. This ample distance of the field where polarization reaches zero is necessary to avoid depolarization. This work examines the effect of further approaching Ec on micro diaphragm pumps. The higher negative actuation voltage increases two fundamental micro pump characteristics. First, would be an increase of maximal flow and second a better air backpressure capability. Sinusoidal actuation, applying higher negative voltages, while keeping the positive amplitude on a standard level, does not cause degradation within one million cycles.