3D applicable ALD film for humidity detection

Conference: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
04/10/2019 - 04/11/2019 at Barcelona, Spain

Proceedings: SmartSystems Integration

Pages: 4Language: englishTyp: PDF

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Dogan, Oezgue; Goertz, Michael (Fraunhofer IMS, Micro and Nanosystems, 47057 Duisburg, Germany)
Mokwa, Wilfried (RWTH Aachen University, Department of Materials in Electrical Engineering, 52074 Aachen, Germany)
Vogt, Holger (University of Duisburg-Essen, Department of Electronic Components and Circuits, Duisburg, 47057 Germany)

In this work, ALD films are developed by alternately applying semiconducting ZnO grains and dielectric Al2O3 grains which result in homogeneous composites with humidity-sensitive properties. Various films, which differ in the grain size ratio of ZnO to Al2O3, are tested with 2D sensor structures. IV-t measurements during interaction of the films with applied water droplets reveal current and resistance changes of up to five orders of magnitude. 3D applicability of these humidity-sensitive films is proven by cross-sectional SEM images of an all-around coated silicon chip.