3D applicable ALD film for humidity detection
Conference: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
04/10/2019 - 04/11/2019 at Barcelona, Spain
Proceedings: SmartSystems Integration
Pages: 4Language: englishTyp: PDF
Personal VDE Members are entitled to a 10% discount on this title
Authors:
Dogan, Oezgue; Goertz, Michael (Fraunhofer IMS, Micro and Nanosystems, 47057 Duisburg, Germany)
Mokwa, Wilfried (RWTH Aachen University, Department of Materials in Electrical Engineering, 52074 Aachen, Germany)
Vogt, Holger (University of Duisburg-Essen, Department of Electronic Components and Circuits, Duisburg, 47057 Germany)
Abstract:
In this work, ALD films are developed by alternately applying semiconducting ZnO grains and dielectric Al2O3 grains which result in homogeneous composites with humidity-sensitive properties. Various films, which differ in the grain size ratio of ZnO to Al2O3, are tested with 2D sensor structures. IV-t measurements during interaction of the films with applied water droplets reveal current and resistance changes of up to five orders of magnitude. 3D applicability of these humidity-sensitive films is proven by cross-sectional SEM images of an all-around coated silicon chip.