Manufacturing Capability of Micro-Transfer Printing
Conference: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
04/10/2019 - 04/11/2019 at Barcelona, Spain
Proceedings: SmartSystems Integration
Pages: 4Language: englishTyp: PDFPersonal VDE Members are entitled to a 10% discount on this title
Gomez, David; Moore, Tanya; Meitl, Matthew A.; Bonafede, Salvatore; Pearson, Andrew; Raymond, Brook; Weeks, Tiffany; Oswald, Kevin; Radauscher, Erich; Kneeburg, David; Roe, Julia; Bower, Christopher A. (X-Celeprint Inc., 3021 Cornwallis Road, Research Triangle Park, NC 27709, USA)
Fecioru, Alin; Kelleher, Steven; Gul, Raja Fazan; Ferrell, Alexandre; Trindade, Antonio Jose (X-Celeprint Ltd., Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, Irland)
Micro-Transfer printing is a mass transfer process that provides fast and precise assembly of micro-components onto non-native substrates. The process was originally conceived at the University of Illinois and has been developed at X-Celeprint. The process involves the fabrication of retrievable micro-components, elastomer stamp fabrication and transfer printing of the micro-components onto non-native substrates and their final interconnection. The transfer printing process enables a large array of micro-components to be transferred in one print , delivering an accuracy of +/- 1.5um 3 σ and transfer yields exceeding 99%.