Integration of plasmonic nanostructures for micro-opto-electromechanical-systems

Conference: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
04/10/2019 - 04/11/2019 at Barcelona, Spain

Proceedings: SmartSystems Integration

Pages: 7Language: englishTyp: PDF

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Heldt, Georg; Otto, Th. (Technische Universität Chemnitz, Zentrum für Mikrotechnologien / Fraunhofer ENAS, Chemnitz, Germany)
Weiß, A.; Erben, J. W.; Kurth, St.; Meinig, M.; Martin, J. (Fraunhofer ENAS, Chemnitz, Germany)
Helke, Chr.; Hiller, K.; Reuter, D. (Technische Universität Chemnitz, Zentrum für Mikrotechnologien, Chemnitz, Germany)

Driven by the demand for miniaturized and highly integrated functionalities in the field of photonics and photonic circuits, metal or plasma optics has developed into a promising method for manipulating light on the nanometer scale. Especially the production of periodic, nanostructured, ultrathin metal films as wavelength filters shows promising approaches for the realization of filter arrays with smallest spatial resolution. By varying the geometric dimensions, such as periodicity, shape or thickness of the structured metal films, selective filter responses in specific spectral ranges can easily be obtained. This publication deals with the lithographic fabrication, the structural and optical characterization of photonic nanostructures for optical microsystems. The optical properties of the systems are defined by the geometric dimensions of the structured aluminum elements. Two different optical microsystems were produced, whose optically active elements are cuboid or cylindrical (see Fig. 1 A and B). The quadratic structures in Fig. 1 A are part of a tunable MEMS Fabry-Pérot Interferometer (FPI) that serves as a filter element for the visible wavelength range. The FPI essentially consists of two reflectors which are arranged parallel. The reflectors form an optical resonator which determines the optical properties of the interferometer. The reflectors must have high reflectivity and low absorption.