How to construct a full-range low-drive optical switch

Conference: MEMAT 2022 - 2nd International Conference on Mechanical Engineering, Intelligent Manufacturing and Automation Technology
01/07/2022 - 01/09/2022 at Guilin, China

Proceedings: MEMAT 2022

Pages: 6Language: englishTyp: PDF

Authors:
Shi, Dehai (GuiZhou Vocational Technology College of Electronics & Information, GuiZhou, China)
Zhang, Junyu; Xiao, Jing (School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin, China)
Chen, Shirong (Guilin Aerospace Electronic Co., Ltd., Guilin, China)

Abstract:
In order to obtain a full-scale MEMS optical switch with excellent driving characteristics as the goal, a full-scale MEMS optical switch is constructed according to the influence of the change of the upper and lower plate thickness on the pull_in function, and the key parameters of the optical switch comb are analyzed. The influence of driving characteristics to select the appropriate optical switch size parameters.