Demonstration of a Novel Monolithically Integrated GaN-on-AlN/SiC Half-Bridge
Conference: PCIM Conference 2025 - International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management
05/06/2025 - 05/08/2025 at Nürnberg, Germany
doi:10.30420/566541090
Proceedings: PCIM Conference 2025
Pages: Language: englishTyp: PDF
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Authors:
Geng, Xiaomeng; Wieczorek, Nick; Kohlhepp, Benedikt; Wolf, Mihaela; Hilt, Oliver; Dieckerhoff, Sibylle
Abstract:
The monolithic integration of GaN-based transistors is challenging due to the substrate-related issues resulting from a common substrate. This work presents a novel 600 V/105 mOhm monolithically integrated GaN-on-AlN/SiC half-bridge with Schottky-type gates, which shows immunity to substrate biasing and thus, enables straightforward on-chip integration without performance degradation. The proposed de-vice is systematically characterized and the impact of the substrate bias on device performance is stud-ied in both static and dynamic measurements. Moreover, the characteristics of the proposed monolithic half-bridge are compared with related discrete transistors using the same device technology, demon-strating the advantages and challenges of monolithic integration. A short-term continuous operation at a switching frequency of 5 MHz and 200 V/5 A in a buck-converter is achieved, highlighting the potential of the proposed monolithic half-bridge for high-frequency applications.