Authors:
Mueller, Friedrich; Braun, Tanja; Le, Thi Huyen; Rossi, Marco; Schwanitz, Oliver; Ndip, Ivan; Hoelck, Ole; Becker, Karl-Friedrich; Boettcher, Mathias; Schiffer, Michael; Aschenbrenner, Rolf; Voitel, Marcus; Schneider-Ramelow, Martin; Wieland, Marcel; Goetze, Christian; Trewhella, Jean; Berger, Daniel
Conference:
MikroSystemTechnik Kongress 2021 - Kongress