Cover IEC 62047-32:2019
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IEC 62047-32:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Circulation Date: 2019-01
Edition: 1.0
Language: EN-FR - bilingual english/french
Seitenzahl: 37 VDE Artno.: 247101

Content

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.