Cover IEC 62047-34:2019
größer

IEC 62047-34:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Circulation Date: 2019-04
Edition: 1.0
Language: EN - english
Seitenzahl: 16 VDE Artno.: 247311

Content

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.