IEC 62047-53:2025
Semiconductor devices - Micro-electromechanical devices - Part 53: MEMS electrothermal transfer device
Circulation Date:
2025-10
Edition:
1.0
Language: EN - english
Seitenzahl: 14 VDE Artno.: 255499
IEC 62047-53:2025 defines the test methods for the performances of MEMS electrothermal transfer device.
The document is applicable to the MEMS electrothermal transfer devices used in airbags, petroleum and mineral detection, igniters and detonators.