Analysis of volatile compounds by nanoelectromechanical photothermal infrared spectroscopy with picogram sensitivity

Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland

Proceedings: MikroSystemTechnik Kongress 2021

Pages: 3Language: englishTyp: PDF

Luhmann, Niklas; Pliessnig, Raphael; Willert, Christoph; Schmid, Silvan (Institute of Sensor and Actuator Systems, TU Wien, Vienna, Austria)
Lafleur, Josiane P. (Invisible-Light Labs GmbH, Vienna, Austria)

During the past decade, so-called nanoelectromechanical photothermal infrared spectroscopy (NEMS-IR) has demonstrated exceptional sensitivities for the analysis of airborne particles up to chemical compounds. Here, we present an advanced approach for quantitative spectral analysis of volatile chemical compounds based on NEMS-IR spectroscopy. We present high resolution infrared spectra of caffeine with a sensitivity of 21 pg obtained with silicon nitride trampoline resonators.