Fabrication of integrated poly-silicon wave guides for mid-infrared absorption spectroscopy using the evanescent field

Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland

Proceedings: MikroSystemTechnik Kongress 2021

Pages: 3Language: englishTyp: PDF

Stocker, Gerald; Grille, Thomas; Kovatsch, Christoph; Bartl, Ulf; Aschauer, Elmar (Infineon Technologies Austria AG, Villach, Austria)
Consani, Cristina; Thakkar, Pooja; Tortschanoff, Andreas; Fleury, Clement (Silicon Austria Labs GmbH, Villach, Austria)
Puehringer, Gerald; Jannesari, Reyhaneh; Saeidi, Parviz; Jakoby, Bernhard (Johannes Kepler University Linz, Linz, Austria)

The increasing popularity to build sensor-controlled environments, as for example smart homes or the interior of modern cars, has a recognizable impact on the number and variety of available sensor systems. Among others, sensing of the environment and ambient gases is of growing interest for many applications as indoor air quality monitoring, detection of gas leakage or even fire detection. We present the fabrication of poly-silicon waveguides, as a platform for sensitive absorption spectroscopy in the mid-infrared using the evanescent field. Simulations predict an evanescent field ratio (EFR) of about 18% and a damping of 0.6 cm(ex -1). Measurements reveal experimental values of 16% EFR and a damping of 1.3 cm-1.