Athermal electro-optic trimmable waveguide design

Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland

Proceedings: MikroSystemTechnik Kongress 2021

Pages: 4Language: englishTyp: PDF

Vermeer, Matthias Leander; Alhareeb, Nadeem Khargan; Trieu, Hoc Khiem; Lipka, Timo (Institute of Microsystems Technology, Hamburg University of Technology, Hamburg, Germany)

High-speed photonic circuits suffer from unnecessary static and dynamic power consumption required for the correction of fabrication non-uniformities and thermal drifts. We propose amorphous silicon on lithium niobate waveguides with a titanium dioxide cladding to obtain a versatile integrated photonics platform. The linear electro-optic tuning mechanism of lithium niobate can be utilized for a tunability up to −7.2 ⋅ 10(exp −6) V(exp −1), while the titanium dioxide cladding is employed to minimize the temperature sensitivity and thus the influence of thermal drifts.