Miniaturized annular arrays for focused ultrasound

Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland

Proceedings: MikroSystemTechnik Kongress 2021

Pages: 4Language: englishTyp: PDF

Krenkel, Marcel; Koch, Sandro G. (Fraunhofer IPMS, Dresden, Germany)
Reitz, Sven; Scharf, Patrick (Fraunhofer IIS/EAS, Dresden, Germany)
Ernst, Daniel (Centre for Microtechnical Manufacturing, TU Dresden, Dresden, Germany)
Wolf, Mario (Institute of Solid State Electronics, TU Dresden, Dresden, Germany)

Focused ultrasound can be utilized in diagnostic and therapeutic applications, such as imaging, neurostimulation or cancer treatment. Miniaturized annular arrays combine the advantages of compactness, low electronic complexity, and variable depth treatment for in-situ and point-of-care examinations in medical and also industrial applications. In this work, we developed models, design specifications, manufacturing processes and a realized assembly concept for waterproof modular annular array probes based on capacitive micromachined ultrasonic transducers (CMUTs). Resonance frequencies from about 3.5 MHz to 9.5 MHz were measured in air verifying the model results.