Modeling and Manufacturing of an Electrostatically Driven Actuator for Micropumps

Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland

Proceedings: MikroSystemTechnik Kongress 2021

Pages: 4Language: englishTyp: PDF

Leistner, Henry; Anheuer, Daniel; Richter, Martin (Micro Dosing Systems, Fraunhofer EMFT, Munich, Germany)
Bosetti, Gabriele; Schrag, Gabriele (Chair of Physics of Electrotechnology, Technical University of Munich, Munich, Germany)

This work constitutes towards a bubble tolerant electrostatic micropump. One key task in this respect is the development of the actuator unit. Specifically, a model is derived utilizing an analytical compact model and comparing it to a numerical continuous-field and a system-level approach, whereby the model allows the estimation of operating voltages, stroke volumes and blocking-pressures of a perspective micropump. Finally, the manufacturing as well as an initial characterization of the actuator unit is presented, enabling the realization of an electrostatically driven micropump.