Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive
Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland
Proceedings: MikroSystemTechnik Kongress 2021
Pages: 4Language: englishTyp: PDF
Authors:
Narimani, Keyvan; Scholles, Michael (Fraunhofer Projektzentrum MEOS, Erfurt, Germany & Fraunhofer IPMS, Dresden, Germany)
Shashank, Shashank (Fraunhofer Projektzentrum MEOS, Erfurt, Germany & Fraunhofer Institute for Photonic Microsystems (IPMS), Cottbus, Germany & Brandenburg University of Technology Cottbus-Senftenberg, Cottbus, Germany)
Langa, Sergiu; Pineda Gomez, Roberto (Fraunhofer IPMS, Dresden, Germany)
Ruffert, Christine (Fraunhofer Institute for Photonic Microsystems (IPMS), Cottbus, Germany)
Schenk, Harald (Fraunhofer IPMS, Dresden, Germany & Brandenburg University of Technology Cottbus-Senftenberg, Cottbus, Germany)
Abstract:
We present results for a microsystem inchworm motor based on Nanoscopic Electrostatic Drive (NED) actuators, fabricated by single crystalline silicon bulk micro-machining on a silicon-on-insulator (SOI) wafer. Actuator elements can easily be added to or removed from the inchworm drive allowing a high adaptability of force and contact area with the movable surface as well as an efficient use of the system’s footprint. In principle, travel ranges of several mm can be easily obtained due to very modular design of the system. The presented inchworm drive is capable of controllable motion up to 1 mm and can generate a force of 1.4 mN at 130V corresponding to a force density of 0.8 mN/mm2 with an average maximum DC power consumption of 11.8 muW in each cycle. Furthermore, the voltage-displacement characteristics of the actuator element was validated by finite element method (FEM).