Novel SiCer based micromechanical imaging radar sensor system
Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany
doi:10.30420/456614014
Proceedings: MikroSystemTechnik Kongress 2025
Pages: 3Language: englishTyp: PDF
Authors:
Tschoban, C.; Becker, K.-F.; Hommes, A.; Geibig, T.; Yellu, S.; Hillebrand, M.; Kleinholz, C.; Hoffmann, M.; Schneider-Ramelow, M.; Mueller, J.
Abstract:
For more than two decades, classic MEMS (Micro-Electro-Mechanical-Systems) technology has made it possible to control mirrors in resonance for optical beam steering. This approach was taken up by the consortium around TU-Berlin, TU-Ilmenau, RuB and Fraunhofer FHR to develop a completely new sensor principle for imaging radar. The basic concept is that a horn antenna is integrated directly into the LTCC (Low Temperature Cofired Ceramic) structure based on SiCer (Silicon-on-Ceramic) technology and is mechanically controlled by an actuator. This allows the antenna to be positioned in different directions for two-dimensional scanning. The transmitter is equipped with a passive frequency scanning antenna suitable for a 2-dimensional scan orthogonal to the MEMS scan area. An overlay of these separated 2-dimensional but synchronized scans makes it possible to generate a 3-dimensional point cloud of the environment.