Rubric: Proceedings - General Proceedings
MikroSystemTechnik Kongress 2025
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VDE e.V. (Ed.)

MikroSystemTechnik Kongress 2025

Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität 27. – 29. Oktober 2025, Duisburg

2025, XXIII, 497 pages, 140 x 124 mm, Slimlinebox, CD-Rom
ISBN 978-3-8007-6614-7, e-book: ISBN 978-3-8007-6615-4
Personal VDE Members are entitled to a 10% discount on this title

Content Foreword

Nichts ist so beständig wie der Wandel
Diese Aussage von Heraklit gilt bis heute unverändert. Wandel findet in vielen Bereichen des Lebens und mit immer höherer Geschwindigkeit statt. Es fällt vielen Menschen zunehmend schwer, dem noch zu folgen.
Fortschritt in der Technik begleitet den Wandel in vielen Themen, etwa bei der Digitalisierung, den erneuerbaren Energien oder der Mobilität. Sie helfen uns, auch die globalen Veränderungen durch neue Herausforderungen wie sich ändernde geopolitische Randbedingungen oder den Klimawandel zu bewältigen oder sie zu gestalten.
Mikroelektronik und Mikrosystemtechnik sind Treiber dieses Fortschritts
Ohne Mikroelektronik und Mikrosystemtechnik kommt keine andere industrielle Branche aus. Die Krisen der letzten Jahre haben gezeigt, dass ein sicherer Zugang zu Hardware in der erforderlichen Qualität und Quantität notwendig ist, von der Standard-Elektronik bis hin zu innovativen Ansätzen. In Deutschland und Europa entstehen neue Fertigungskapazitäten und führen auch zu neuen Herausforderungen im Bereich der Fachkräfte-Gewinnung. Leider werden – wie Studien des VDE zeigen – Innovationen eher mit Informatik in Verbindung gebracht, Elektrotechnik gilt bei Schülern und Lehrern als wenig innovativ und wird mit „Strippen ziehen" in Verbindung gebracht. Hier braucht es unser Engagement, um diesen Vorbehalt mit Beispielen zu widerlegen. Wir hoffen, dass der Mikrosystemtechnik-Kongress hierzu einen Beitrag leisten kann und neue Anstöße gibt.

Wir laden ein nach Duisburg
Wir laden Sie herzlich nach Duisburg, den Industriestandort mit den letzten Hochöfen in der Metropole Ruhr ein, in der viele Zukunftstechnologien beheimatet sind. Hier findet nicht zuletzt der Wandel von der durch Kohle geprägten zur nachhaltigen Industrie statt. Im Rahmen der Abendveranstaltung werden wir den Landschaftspark Nord, eine ehemalige Hochofenanlage und Teil der Route Industriekultur, besuchen.
Wir freuen uns auf Ihre Beiträge, die den Wandel durch Fortschritt heute und in Zukunft aufzeigen. Der Kongress ist eine gute Gelegenheit, um mit Kolleginnen und Kollegen ins Gespräch zu kommen, die eigenen Ergebnisse zu präsentieren und neue Impulse mitzunehmen.
Der VDE – Verband der Elektrotechnik Elektronik Informationstechnik e.V. ist einer der großen europäischen Verbände für Branchen und Berufe der Elektro- und Informationstechnik. Eine internationale Experten-Plattform für Wissenschaft, Normung und Produktprüfung – interdisziplinär, eng verflochten, und einmalig auf der Welt. Eine geballte Konzentration an Erfahrung, Marktkenntnissen und technologischem Know-how.
Search Conference Papers
1

Single-photon detection in Ge- & GeSn-on-Si avalanche photodiodes

Authors:
Wanitzek, Maurice; Ramachandra, Harishnarayan; Spieth, Christian; Hack, Michael; Seidel, Lukas; Schaefer, Soeren; Schwarz, Daniel; Daus, Alwin; Oehme, Michael
2

Highly thermally conductive and integratable circuit carriers based on anodized aluminum

Authors:
Petillon, Simon; Koch, Dominik; Knoeller, Andrea; Kallfass, Ingmar; Eberhardt, Wolfgang; Zimmermann, Andre
3

Deformation Of A Spherical Droplet Into Fluidic Lens Under EWOD Effect Through A Simulated Perforated Multi Stacked Hydrophobic Microsystem

Authors:
Das, Debatri; Hoffmann, Martin
4

Influence of composition in sputtered multi-layer cavity enhanced Schottky SWIR photodetectors

Authors:
Augel, Lion; Knobbe, Jens; Shala, Leonor
5

Application of shifted excitation Raman difference spectroscopy for material identification towards sustainable recycling processes

Authors:
Sowoidnich, Kay; Mueller, Andre; Rudisch, Katharina; Pufahl, Karsten; Regir, Valentin; Sumpf, Bernd; Maiwald, Martin
6

Smart and ultra-compact hyperspectral camera

Authors:
Knaack, Marcus; Engelke, Heinrich; Jongmanns, Marcel; Devi, Sharda; Jablonski, Ireneusz
7

Investigation of fractal noise in phase measurement of optical QRNG systems using digital and analog processing methods

Authors:
Narayanan, Bhuvnesh; Firoozi, Mehrzad; Srinivasan, Anandhakrishnan; Kirrbach, Rene; Faulwasser, Michael
8

Blade Milling For Quantum Computing

Authors:
Gang, Andreas; Junghaehnel, Manuela
9

Test Rig for the Calibration of Multi-Component Sensors in Three Degrees of Freedom for Drive Monitoring

Authors:
Hehn, Thorsten; Gross, Jan; Zimmermann, Lukas; Willmann, Alexander; Folkmer, Bernd; Schumacher, Axel; Dieter, Christoph; Zizelmann, Christoph; Rietsche, Hansjoerg; Amft, Oliver
10

Miniaturized Volumetric Dosing System for Automated Nanoliter Precision Dosing of Liquids

Authors:
Zett, Oliver; Strobel, Hanna; Knorr, Agnes; Richter, Martin
11

Novel Time-Sensitive Networking Testbed for Energy-Efficient, Realtime Connectivity

Authors:
Meissner, Philipp; Kirrbach, Rene; Baer, Frank
12

Reusable silicon-glass chip for consecutive Polymerase Chain Reaction

Authors:
Funke, Nils; Li, Xiangping
13

Packaging Technologies For High Frequency Applications Using Polymer Materials

Authors:
Barth, Maximilian; Werum, Kai; Eberhardt, Wolfgang; Fritz, Karl-Peter; Zimmermann, Andre
14

Novel SiCer based micromechanical imaging radar sensor system

Authors:
Tschoban, C.; Becker, K.-F.; Hommes, A.; Geibig, T.; Yellu, S.; Hillebrand, M.; Kleinholz, C.; Hoffmann, M.; Schneider-Ramelow, M.; Mueller, J.
15

Energy and CO2 Savings for High-Density Rack Servers Using 1-Stage and 2-Stage 48 V to 1 V PoL Solutions

Authors:
Zeltner, Stefan; Eckardt, Bernd
16

Towards a Modular 5G Motion Capture Testbed for Indoor UAVs

Authors:
Cortes Martinez, Rolando; Suryawanshi, Abhijeet Sanjay; Ruffert, Christine; Herglotz, Christian; Schiffer, Johannes
17

Fingerprinting Architecture based on a MEMS Varactor Array for Hardware Security

Authors:
Meinel, Katja; Schott, Christian; Mayer, Franziska; Gupta, Dhruv; Mittag, Sebastian; Hahn, Susann; Weidlich, Sebastian; Buelz, Daniel; Forke, Roman; Hiller, Karla; Heinkel, Ulrich; Kuhn, Harald
18

Modular 5G-Communication and Radar based Animal Health Monitoring System for Smart Live Stock Farming

Authors:
Brockmann, Carsten; Maass, Uwe; Charan Pasupuleti, Sriram; Yeasmin Usha, Tamanna; Ndip, Ivan; Rotta, Randolf; Karnapke, Reinhardt; Herglotz, Christian; Pearl Doe, Nina; Ulbricht, Markus; Wolpert, Ilonka; Ruffert, Christine; Scholles, Michael
19

Ein stromgesteuerter 3.3V 6-bit Digital-Analog-Wandler mit organischen Duennfilmtransistoren auf einem flexiblen Polyimid- Substrat

Authors:
Li, Mengyao; Passlack, Ulrike; Edelmann, Kevin; Burghartz, Joachim N.; Yu, Zili
20

Development and Application of an Ultrasound Camera for Position Tracking of Objects and Individuals

Authors:
Koch, Sandro G.; Jongmanns, Marcel; Monsalve, Jorge M.; Stolz, Michael; Suawa, Priscile; Herglotz, Christian; Holzschuh, Robert; Ruffert, Christine
21

Novel type of self-priming porous ports for microfluidic applications

Authors:
Lisec, Thomas; Behrmann, Ole; Teja Bodduluri, Mani; Karl, Werner J.; Jagadesh, Nagashree B.; Gojdka, Bjoern
22

Wafer-Level Design Und Produktion Von Komponenten Fuer Optische Faser- Chip Schnittstellen In KI Rechenzentren

Authors:
Hauschild, Dirk; Noell, Wilfried
23

Reducing Latency in 5G IIoT Networks Using in-Network Processing

Authors:
Karnapke, Reinhardt; Werban, Phillip; Ruffert, Christine
24

Electrohydrodynamic Printing of Nanoparticle-Based Silver Inks: A Study Towards Fabrication of Skin-Like Wearable Devices

Authors:
Philippin, Nadine; Kuehne, Ingo; Schrag, Gabriele
25

ZuSE-KI-mobil Software Development Kit for AI Acceleration

Authors:
Friedrich, Martin; Lueders, Matthias; Renke, Oliver; Weddige, Sousa; Riggers, Christoph; Blume, Holger; Friedrich, Simon; Mojumder, Shaown; Matus, Emil; Fettweis, Gerhard; Ahmadifarsani, Samira; Kontopoulos, Leonidas; Schlichtmann, Ulf; Hoefer, Julian; Schmid, Patrick; Toto-Kiesa, Hella; Becker, Juergen; Kock, Markus; Schewior, Gregor; Blume, Steffen; Grantz, Darius; Benndorf, Jens; Fasfous, Nael; Mori, Pierpaolo; Voegel, Hans-Joerg; Teepe, Gerd; Bierzynski, Kay
26

Revisiting a Predictive Maintenance Toolbox: Sensor Retrofit and Workflow Demonstration with a Paired Sensor Study

Authors:
Lautsch, Martin Thomas; Abdalla, Khaled M. A. A.; Berger, Ulrich
27

Infrastructure Concept for Contactless Monitoring of Incontinence Material

Authors:
Gupta, Dhruv; Nagarajan, Sridhar; Schott, Christian; Markert, Erik; Heinkel, Ulrich
28

Micromechanical counter device with highly advanced cycle count for recording of up to 9900 sterilization events

Authors:
Hoffmann, Daniel; Spieth, Sven; Herrlich, Simon; Erben, Andreas; Pagel, Kenny; Dehe, Alfons
29

MEMS for preventive Healthcare

Authors:
Serout, Anne; Podbiel, Daniel; Kadic, Samir; Knapp, Michael; Vincent, Heloise
30

Development of a Microfluidic Chip with Integrated Hydrogel Membranes for Tissue Engineering Applications

Authors:
Ehlers, Lisa Marie; Rennpferdt, Lukas; Trieu, Hoc Khiem
31

Quantification of Environmental Potentials of Microelectronics Production Processes - Green ICT @ FMD

Authors:
Nissen, Nils F.; Stobbe, Lutz; Groth, Anne; Myndyk, Maksym
32

Piezoelectric Conversion of Thermomagnetic Energy from Waste Heat

Authors:
Wischnewski, Maxim; Joseph, Joel; Ohtsuka, Makoto; Miki, Hiroyuki; Kohl, Manfred
33

Industrial Use of Private 5G-Network: Development of a Mobile Demonstrator to Test Network Coverage

Authors:
Levon, Johan; Ruffert, Christine; Herglotz, Christian
34

5G Campus Networks at Brandenburg University of Technology Cott-bus-Senftenberg

Authors:
Ruffert, Christine; Habel, Kai; Herglotz, Christian
35

Process development for manufacturing blazed gratings using grayscale lithography

Authors:
Giese, Henning; de Wall, Sascha; Wurz, Marc Christopher
36

Erfahrungen aus dem Freilandeinsatz einer Blatt-Kuevette

Authors:
Frey, Yasmina; Dumberger, Stefanie; Stock, Clara; Haberstroh, Simon; Werner, Christiane; Wallrabe, Ulrike
37

Comparison of FTIR and SIFT-MS for the Detection of Climate-relevant Gases in PE-CVD and Plasma Etching Processes in MEMS and Microelectronics Manufacturing

Authors:
Loesel, Maximilian; Schumann, Erik; Dill, Pauline; Mueller, David; Volk, Sebastian
38

Greener Solvents For Removing Polyimide-based Temporary Bond Adhesive Residues

Authors:
Riffert, Aron; Gang, Andreas; Gueenc, Haci Osman; Junghaehnel, Manuela
39

MEMS-Based Measurement of the Ion Angle Distribution for Sustainable Semiconductor Dry Etching

Authors:
Melzer, Marcel; Meinel, Katja; Stoeckel, Chris; Hemke, Torben; Mussenbrock, Thomas; Zimmermann, Sven
40

Monolithically integrated tungsten masses for tuning of the resonance frequency of MEMS

Authors:
Clausen, Niels; Bodduluri, Mani Teja; Lisec, Thomas; Gojdka, Bjoern
41

Wearable CMUT-Array for Online Monitoring of Blood Flow

Authors:
Voelz, Uwe; Betz, Bjoern; Kircher, Marco; Koeble, Soeren
42

Biomimetic Nanostructured 3D Microelectrode Systems for Spatially Resolved Electrophysiological Cell Recordings

Authors:
Baumann, Benjamin; Nowduri, Bharat; Jakoby, Michaela; Schulte, Steven; Britz-Grell, Anette; Meyszner, Antoine; Weisgerber, Marie-Claire; Koch, Klaus Peter; Schaefer, Karl-Herbert; Rabe, Holger; Saumer, Monika
43

Fluid-Acoustic Microchip for Cell Manipulation

Authors:
Leikam, Barbara; Pandey, Shilpi; Hayden, Oliver; Schrag, Gabriele
44

Towards fast and precise phase-only modulation-based adaptive optics to improve widefield microscopic imaging of scattered objects

Authors:
Bennewitz, Felix; Berndt, Dirk; Kourkoulos, Dimitrios; Darvin, Maxim
45

Active capsule for sampling intestinal liquid biopsy for microbiome analysis

Authors:
Shahadha, Mohammed Hadi; Gruner, Denise; Voigt, Andreas; Marschner, Uwe; Richter, Andreas; Le Floch, Maxime; Hampe, Jochen; Brauer, Frank; Schostek, Sebastian
46

Novel Type of Anchoring for Polysilicon-Based Movable Microstructures with Highly Improved Mechanical Resilience

Authors:
Lisec, Thomas; Clausen, Niels; Klingbeil, Finn; Jensen, Bjoern; Dankwort, Torben; Gojdka, Bjoern
47

AlScN process platform for MEMS actuators with PZT like performance

Authors:
Kreutzer, Tom-Niklas; Stoppel, Fabian; Ghori, Muhammad Zubair; Lofink, Fabian; Fichtner, Simon
48

Integration und Demonstration der 1T1C FeMFET Speicher- technologie fuer In-Memory-Computing-Anwendungen

Authors:
Seidel, Konrad; Lehninger, David; Suenbuel, Ayse; Hoffmann, Raik; Revello, Ricardo; Yadav, Nandakishor; Vardar, Alptekin; Maehne, Hannes; Bernert, Kerstin; Thiem, Steffen; Barbot, Justine; Kaempfe, Thomas; Lederer, Maximilian
49

On-chip Refractive Index Sensors in 200 mm Wafer Silicon Technology

Authors:
Berkmann, Fritz; Reiter, Sebastian; Senguel, Akant; Mai, Christian; Chavarin, Carlos Alvarado; Wenger, Christian; Fischer, Inga Anita
50

Variability Reduction in RRAM through Device Stack Engineering

Authors:
Bende, Ankit; Paul, Godwin; Solfronk, Oliver; Hoffmann-Eifert, Susanne; Dittmann, Regina; Rana, Vikas
51

Zentrifugale Mikrofluidik-Array-Technologie (CM-ArT) fuer schnelle und hochparallele Pikoliter-Partitionierung

Authors:
Heyer, Marvin; Murad, Salman; Lickert, Fabian; Gmoser, Helena; Hutzenlaub, Tobias; Paust, Nils; Juelg, Peter
52

A Finite Element Study of Electrode Configurations and Geometries for Electrostatic Stray Field Actuators

Authors:
Schuetz, Arwed; Hoffmann, Martin; Bechtold, Tamara
53

MULTISTABILER MAGNETISCHER HUBAKTOR OHNE BIEGEBALKEN FUER GROSSE VERTIKALE AUSLENKUNGEN

Authors:
Weber, Pascal M.; Wallrabe, Ulrike
54

Motion Primitive Based Predictive Control of a Rotational Actuator Driven by Contact and Friction

Authors:
Olbrich, Michael; Mueller, Christopher; Laun, Joshua; Ament, Christoph
55

3D printed HASEL platform using the effect of phase transition

Authors:
Hubracht, Andreas; Thelemann, Albert; Jiao, Chen; Tripathi, Ashwani Sharan; Marschner, Uwe; Richter, Andreas; Vorrath, E.-F. Markus; Maas, Juergen
56

Microstructuring and Fine Tuning of Glass- And Silicon Nitride-Based Microsystems by Focused Electron-beam Irradiation

Authors:
Weigel, Christoph; Holz, Mathias; Strehle, Steffen
57

Versatile integrable reflective coatings on micro-mirror arrays for VIS and NIR spectral range

Authors:
Mohammad, Qaid; Franze, Peter; Lei, Long; Navarro Fuentes, Maria Esperanza; Ntokap Nguemegne, Ghislain; Doering, Sebastian
58

Development of Technological Building Blocks for Heterogeneously Integrated sub-THz RF Sensors

Authors:
Maass, Uwe; Ndip, Ivan; Gaebler, Alexander; Kaule, Evelyne; Heinrich, Wolfgang; Krozer, Viktor; Tschammer, Paul; Suetbas, Batuhan; Ertuetk, Volkan; Hasan, Raqibul
59

Methods for Post-CMOS Integration of Micro-Electronics and -Photonics

Authors:
Westhues, Marcus; Patel, Megha; Burkard, Roman; Geruschke, Thomas; Hauser, Julia; Nesic, Aleksandar; Schall-Giesecke, Anna Lena
60

Enhancing the Applicability of Femtosecond Laser Written Wave-guides in Fused Silica

Authors:
Rennpferdt, Lukas; Bohne, Sven; Trieu, Hoc Khiem
61

Fiber Optrode with Microstructured Tips for Precise Light Delivery in Optogenetic

Authors:
Hohlfeld, Dennis; Petrovic, Jelena
62

Quasi-Monolithic Integration (QMI) Enables New Possibilities for Sensor and MEMS Applications

Authors:
Lorenz, Lukas; Herrmann, Andreas; Goeckeritz, Jenny; Eritt, Michael; Amelung, Joerg
63

Rapid Gas-Triggered Printing of Stone and Stone-like Materials

Authors:
Xin, Chenxing; Tisato, Silvio; Goralczyk, Andreas; Rapp, Bastian E.
64

Bottom-up strategy to develop ultrathin active layers by atomic layer deposition for room temperature hydrogen sensors

Authors:
Morales, Carlos; Tschammer, Rudi; Guttmann, Dominic; Henkel, Karsten; Flege, Jan Ingo; Alvarado, Carlos; Wenger, Christian
65

Robust Waterproofing for Sensor Systems: A Two-Component Enclosure for Reliable Monitoring harsh Environments

Authors:
Bruening, Johannes; Luetkenhorst, Lisa; Huenten, Vanessa; Lange, Niklas; Schlueter, Michael
66

3D-Printing of Sustainable Polymer-Matrix-Composites

Authors:
Hanemann, T.; Huebschen, M.; Liebig, W.; Noetze, D.; Qazzazie-Hauser, A.
67

MOVPE growth of lattice matched GaxIn(1-x)AsyP(1-y) for heterojunction bipolar transistors in 6G applications

Authors:
Possberg, Alexander; Abts, Jonathan; van Essen, Fabian; Watermann, Jonas; Mueller, Konrad; Zhang, Hao; Ebbert, Jan; Liborius, Lisa; Weimann, Nils
68

Parameteroptimierung modengekoppelter Diodenlaser zur Zwei-Photonen Polymerisation

Authors:
Surkamp, Nils; Behlau, Felix; Wohlfeil, Shulin; Knigge, Andrea; Esen, Cemal; Ostendorf, Andreas; Hofmann, Martin R.
69

Reduction of NF3 consumption during the cleaning of a PECVD cham-ber

Authors:
Hesse, Anne
70

Anchoring Hollow Nanoneedles in a Free-Standing Plate for Integration in a Microfluidic System

Authors:
Brechmann, Noah; Seidl, Karsten
71

Fortschritte bei der Prozessgeschwindigkeit von diodenlaserbasierter Zwei-Photonen-Polymerisation

Authors:
Behlau, Felix; Surkamp, Nils; Hofmann, Martin R.; Esen, Cemal; Ostendorf, Andreas; Wohlfeil, Shulin; Knigge, Andrea
72

Utilizing irregular microlens arrays for compact far-field beam shaping

Authors:
Leitel, Robert; Kundu, Rohan; Stefanidi, Dmitrii
73

Passive Mask Charge Control for Improved Reactive Ion Etching of Silicate Glasses

Authors:
Bhardwaj, Anant; Wedrich, Karin; Brokmann, Ulrike; Strehle, Steffen; Weigel, Christoph
74

Manufacturing process of 10 nm SiNx membranes for solid-state nanopore sensing

Authors:
Leibold, Anja; Blattert, Christoph; Gutsch, Sebastian; Dehe, Alfons
75

Creation of biomimetic structures in functional glasses from biological surfaces by combining nanoimprinting and reactive ion etching

Authors:
Nuesslein, Jakob; Weigel, Christoph; Mondal, Sagnik; Strehle, Steffen
76

A glass-based MEMS switch approach for harsh environments and high-performance RF applications

Authors:
Schudak, Svenja; Bertke, Maik; Heinz, Jannis B.
77

Sophisticated 3D Patterning by E-Beam and i-line Grayscale Lithography and followed RIE and DRIE structure transfer to enable future photonic, NEMS and MEMS application fields

Authors:
Schermer, Sebastian; Helke, Christian; Gottwald, Markus; Kohlschreiber, Pia; Bonitz, Jens; Haase, Micha; Umlauf, Georg; Hiller, Karla; Reuter, Danny
78

On the combination of pyrolysis and plasma to create Parylene C thin films

Authors:
Schober, Konstanze; Meyer, Niklas; Koldehoff, Jasmin; Brandt, Julia; Trieu, Hoc Khiem
79

Substitution of N-Methyl-2-pyrrolidone (NMP) for Semiconductor Technologies

Authors:
Bornhorst, Kirstin; Al-Falahi, Falah Qasem Ali; Drabe, Christian; Lu, Zhiqiu; Navarro Fuentes, Maria Esperanza; Wagner, Maximilian
80

Realization and Mounting of Additively Manufactured 3D Structures on Diced Microsystem Chips using Material Jetting

Authors:
Hauck, Lukas; Knechtel, Roy
81

Review on ceramic multilayer circuit carriers for monolithic sensor integration

Authors:
Bartsch, Heike; Nessimian, Norayr; Kaltwasser, Mahsa; Mueller, Jens
82

Improved visualization and understanding of complex microsystems through 3D-printed haptic models.

Authors:
Knechtel, Roy; Wenig, Micaela; Hauck, Lukas
83

Fabrication-Compatible Photonic Structures for Ultra-Wide Visible Light Beam Shaping via Meta-Gratings

Authors:
Wang, Zhen; Theobald, Dominik; Tritschler, Patrick; Lemmer, Uli
84

Numerical Modeling of Polarization Vortex Evolution in Strained Ferroelectrics

Authors:
Degen, Marvin; Jandieri, Vakhtang; Svejda, Jan Taro; Erni, Daniel
85

Modeling and extraction of residual stresses in MEMS multilayer systems

Authors:
Long, Li; Long, Frank; Schwartz, Bernhard; Brokmann, Geert; Ortlepp, Thomas
86

Liquid Characterization Using A Dielectric Slot Waveguide And Machine Learning For Sensing In The Terahertz Regime

Authors:
Das, Paulami; Dausien, Kristof; Burfeindt, Marcel Alver; Schmitt, Lisa; Rolfes, Ilona; Barowski, Jan; Hoffmann, Martin
87

Software Toolbox for Intelligent Energy Management and System Optimization

Authors:
Beck, Tobias; Lange, Christopher; Ruess, Alexandra
88

TiN Nanogap Electrodes for DNA Nanoelectronics and Computing: Fabrication and Characterization

Authors:
Abedin, Saadman; Reich, Peggy; Bartsch, Heike; Pezoldt, Joerg
89

Success models from the competence centre for resource-conscious information and communication technology – "Green ICT @ FMD"

Authors:
Thesen, Manuel; Adu, Lotta; Walter, Hans; Ceren Aslan, Tugana; Huebler, Daniela
90

Demonstration of Low Power and Multifunctional Neurons with Only a Few Ferroelectric Transistors

Authors:
Grenmyr, Andreas; Zhang, Jiayuan; Moto, Kenta; Sun, Jingxuan; Sakib, Nazmus; Gruetzmacher, Detlev; Knoch, Joachim; Zhao, Qing-Tai
91

Development of a Robust and Highly Precise Process for Sub-100 nm T-gates

Authors:
Zhang, Hao; Becker, Jing; Haeuser, Patrick; Kahilogullari, Tekin; Liborius, Lisa; Ritter, Daniel; Michels, Thomas; Weimann, Nils
92

Novel 3d Fabrication Method for Micro-Flame Ionization Detectors

Authors:
Bohne, Sven; Lienerth, Peter; Trieu, Hoc Khiem
93

Efficient Condition Monitoring with Si-DMS and RFID Technology: An Autonomous RF-based Surface-Mountable Measurement System

Authors:
Frank, Thomas; Hermann, Stefan; Gruen, Andre; Kermann, Manuel; Hintz, Michael; Cyriax, Andrea; Ettrich, Klaus; Peitsch, Peter; Kahl, Sebastian
94

Multi-band Plasmonic Metamaterial Absorbers for Multispectral Microbolometers

Authors:
Litke, Alexander; Ewering, Johannes; Dittrich, Dirk; Dreiner, Stefan; Weyers, Sascha; Schall-Giesecke, Anna Lena
95

Optimized Si-DMS: Reducing Thermal Effects for More Accurate Measurements

Authors:
Frank, Thomas; Pobering, Sebastian; Hermann, Stefan; Gruen, Andre; Kermann, Manuel; Hintz, Michael; Cyriax, Andrea
96

Optimization of Charge Transfer on Fluorinated Polymers towards Efficient Sustainable Energy Harvesters: Triboelectric Nanogenerators (TENGs)

Authors:
Dreher, Franziska; Van Patten, Breezy; Ul Hassan, Tayyeb; Balzer, Bizan N.; Goralczyk, Andreas; Rapp, Bastian E.
97

Comparison of piezoresistive, capacitive and optical pressure sensors for consumer electronics

Authors:
Kreutzer, Joachim F.; Block, Thomas; Kehrberg, Steven
98

Piezoelectrically driven MEMS cantilever-based sensors for gas detection

Authors:
Meyer, Jana Marie; Blohm, Lars; Buriks, Manuel; Eisermann, Christian; Nsubuga, Lawrence; Marcondes, Tatiana Lisboa; de Oliveria Hansen, Roana; Lofink, Fabian
99

Prestructured PEEK Substrates – New Degrees of Freedom for Sensor Applications

Authors:
Fischer, Eike Christian; Bengsch, Sebastian; Werner, Michael
100

3D-integrated post-CMOS pressure sensor for medical applications

Authors:
Maas, Rahel-Manuela; Haenel, Kathrin; Haase, Nina; Albert, Andreas; Figge, Martin; Seidl, Karsten
101

A novel Optocoupler Technology for Gbit/s Data Rates and high Isolation Voltages in the kV-Range

Authors:
Schmieder, Kai; Schneider, Tobias; Kirrbach, Rene
102

Strategies for Wavelength-Selective Ge Photodetectors in 200 mm Wafer Silicon Technology

Authors:
Augel, Lion; Reiter, Sebastian; Senguel, Akant; Mai, Christian; Chavarin, Carlos Alvarado; Oleynik, Paul; Berkmann, Fritz; Wenger, Christian; Fischer, Inga Anita
103

Efficient Thermal Tuning of Silicon Ring Resonators Based on Thermo-Optic Effect

Authors:
Alhareeb, Nadeem K.; Haydar, Ahmad; Vermeer, Matthias L.; Trieu, Hoc Khiem; Lipka, Timo
104

A compact catadioptric multi-channel LWIR camera with a large field of view

Authors:
Leitel, Robert; Karl, Johanna Klara; Oberdoerster, Alexander; Kleinle, Sylke
105

Effects of temperature and light on CeO2/SnO2 thin-film hydrogen sensors

Authors:
Mudundi, Amrutha; Kalra, Amanpreet; Tschammer, Rudi; Morales, Carlos; Flege, Jan Ingo; Fischer, Inga Anita; Chavarin, Carlos Alvarado; Wenger, Christian
106

Ion-Sensitive Field-Effect Transistors for Potassium Sensing

Authors:
Kühne, L. T.; Wambold, M.; Beale, C.; Al-Falahi, F.; Kurth, E.; Hild, O. R.; Ruffert, C.
107

Ultra-Low Frequency Acoustic-Flux Sensor for Efficient Gas Sensing

Authors:
Gupta, Akash; Bittner, Achim; Dehe, Alfons
108

AMR current sensor with monolithically integrated bias magnets

Authors:
Gojdka, Bjoern; Clausen, Niels; Glenske, Claudia; Hille, Pascal; Becker, Laurin; Paul, Johannes; Bodduluri, Mani Teja; Lisec, Thomas
109

Modeling of Piezoelectric Bistable MEMS

Authors:
Platz, Daniel; Fabian, Johannes; Schmid, Ulrich
110

3D-Integration process for back side illuminated image sensors

Authors:
Zeidler, Christopher; Jung, Melanie; Jimenez, Lucia Del Rosario Alcala; Figge, Martin
111

Compact Benchtop Device for Molecular Vapor Deposition of Self-Assembled Monolayers Used in Nanoimprint Lithography

Authors:
Henkel, Marvin; Handte, Thomas; Bohm, Sebastian; Krech, Johannes; Dittrich, Lars; Strehle, Steffen
112

Towards phase-change contacts in PEALD grown molybdenum disulfide via intercalation by focused-ion beam

Authors:
Kruener, Marvin; Becher, Malte Jonas Marius Julian; Nadzeyka, Achim; Kahl, Michael; Ostendorf, Andreas
113

Study on the Thermal Stability of Monolithically Integrated PowderMEMS(r) Magnets for Microelectronic Components

Authors:
Gojdka, Bjoern; Bodduluri, Mani Teja; Zierold, Robert; Hoeppner, Tina; Blick, Robert H.; Lisec, Thomas
114

Development of Crystallized Thick, Highly Doped a-Si:H Layers for Surface Micromachining of MEMS

Authors:
Zhang, Yimei; Quenzer, Hans-Joachim; Jensen, Bjoern; Zollondz, Jens-Hendrik; Müller-Groeling, Axel
115

Wafer-scale atomic layer etching of Al2O3 and 2D-MoS2 grown by plasma-enhanced atomic layer deposition

Authors:
Vogel, Leander; Becher, Malte J.M.J.; Plate, Paul; Ostendorf, Andreas; Bock, Claudia
116

Mechanischer „Operationsverstärker“ mit elektrostatischer Anti- Feder

Authors:
Schmitt, Philip; Schmitt, Lisa; Hoffmann, Martin
117

Innovative High-Temperature Ceramic Coatings via Inkjet printing of polysilazane/MoSi2 Inks

Authors:
Qazzazie-Hauser, A.; Kraemer, J.; Honnef, K.; Hanemann, T.
118

Gruenden eines MEMS-Start-ups: Von der Forschung zum Produkt

Authors:
Schmitt, Philip; Schmitt, Lisa; Wittemeier, Steffen; Mays, Henning; Fernandez-Ortega, Juanita; Hoffmann, Martin
119

Miniaturized Lagrangian Sensor-Systems for Position Detection in (Bio-)Chemical Reactors

Authors:
Gelaeschus, Anton; Haack, Marcel; von Sulecki, Julius; Trieu, Hoc Khiem
120

Development of a system for nanoscale tip-based 3D material deposition from the gas phase

Authors:
Krech, Johannes; Holz, Mathias; Reuter, Christoph; Strehle, Steffen
121

Equivalent Circuit Simulation-based Design of a Chemo-fluidic Analog/Digital Flash-Converter (ADC)

Authors:
Marschner, Uwe; Voigt, Andreas; Richter, Andreas
122

Artificial Intelligence & Software Enablers for Modern Microsensor Systems

Authors:
Hartmann, Bastian; Tritschler, Patrick; Wenzel, Matthias; Degenfeld-Schonburg, Peter
123

Vision of the APECS Pilot Line

Authors:
Guttowski, Stephan; Toepper, Michael; Grimm, Andreas
124

Advanced Heterogeneous System Integration of Chiplets and Quasi-Monolithic Integration

Authors:
Jung, Erik; Toepper, Michael; Mensing, Michael; Roscher, Frank; Hefer, Jan; Mai, Andreas; Becker, Karl Friedrich; Schneider-Ramelow, Martin; Ganesh, Ulrike
125

System-Technology-Co-Optimisation: The Heterogeneous Design Methodology in the APECS Pilot Line

Authors:
Prautsch, Benjamin; Herzer, Elmar; Mensing, Michael; Kuenzel, Petra; Dietz, Marco; Luedecke, Andre; Boerma, Hendrik; Hopsch, Fabian
126

Characterization, testing & reliability for heterogeneous integration of chiplets

Authors:
Kriesten, Daniel; Poellmann, Norbert; Wecker, Julia; Schroeder, Dominik; Brand, Sebastian; Benndorf, Christopher; Strieter, Emanuele; Kabakci, Nisha Jacob; Kurth, Steffen; Altmann, Frank
127

Investigating the Controllability of Corrugated Piezoelectric MEMS Microphones

Authors:
Friebe, Til; Lenz, Maximilian; Ahrens, Henning; Bretthauer, Christian; Schrag, Gabriele
128

Advanced Packaging solutions for HPC, Communication and sensor modules enabled by APECS pilot line

Authors:
Jordan, Rafael; Herzer, Elmar; Mensing, Michael; Moehrle, Martin; Schroeder, Henning; Dietz, Marco; Toepper, Michael
129

Development of a VO2/Si Optical Modulator with Co-Integrated Mi-cro Heater

Authors:
Li, Danni; Li, Zixiong; Fortmann, Jill; Ludwig, Alfred; Kohl, Manfred
130

Utilizing RF-Chiplets For A Reconfigurable Automotive Radar System-In-Package

Authors:
Stadler, Pascal; Geissler, Christian; Fromme, Philipp; Comak, Yasin; Pohl, Nils; T. Braun, Tobias
131

RISC-V Based System on Chip for Wearable Speckle Plethysmography

Authors:
Nolting, Stephan; Rolfes, Carsten
132

Electrical Droplet Position Feedback System for a Digital Microfluidic Platform

Authors:
Wagner, Jan; Schliep, Aron; Schnakenberg, Uwe
133

A Modular Pointing and Tracking System for Terrestrial Quantum Key Distribution

Authors:
Stephan, Mira; Schneider, Tobias; Klingmann, Fabian; Kirrbach, Rene
134

Steep slope cryogenic CMOS devices for quantum computing

Authors:
Zhao, Qing-Tai; Han, Yi; Sun, Jingxuan; Gruetzmacher, Detlev; Knoch, Joachim
135

Design, Simulation, and Fabrication of a MEMS-Based Electrostatic Microactuator for Precise Spherical Rotation

Authors:
Sudhahar, Dwarakesh; Hoffmann, Martin
136

MEMS tunable high-quality resonators for the THz range

Authors:
Schmitt, Lisa; van der Herten, Jannis; Sanchez Pastor, Jesus; Jimenez-Saez, Alejandro; Hoffmann, Martin
137

Switchable Microvalve for High-Pressure Applications

Authors:
Venegas-Rojas, Daybith
138

Optimized assembly of a CMOS-integrated strain sensor for high-precision deformation measurements

Authors:
Schumacher, Axel; Maveya, Ume; Hehn, Thorsten; Knappmann, Stephan; Rietsche, Hansjoerg; Dehe, Alfons
139

Validation of Synthesis Routes for Ferroelectric Barium Strontium Titanate for Potential Applications in Microsystem Technology

Authors:
Honnef, Kirsten; Ade, Martin; Cimen, Emine; Ketterer, Ines; Schoenfelder, Julia; Hanemann, Thomas
140

Electrical and Fluidic Relations in a Piezoelectric Micro Diaphragm Pump

Authors:
Zimmermann, Anne; Richter, Martin; Fischer, Georg
141

Elektrostatischer Kammaktor fuer kombinierte Translation und Rotation

Authors:
Hillebrand, Marius; Hoffmann, Martin
142

Optimization and characterization of a miniaturized piezoelectric inchworm actuator for large force/ stroke applications in implants

Authors:
Mueller, Sonja; Khosravi, Jahangir; Azarhoushang, Bahman; Mescheder, Ulrich
143

Concept and system aspects of MEMS magnetically tunable THz-filters based on metasurfaces

Authors:
Kondamarri, P.; Petit, J.; Kovacs, A.; Herbko, M.; Maciusowicz, M.; Szymanik, B.; Psuj, G.; Lopato, P.; Mescheder, U.
144

Control-oriented modeling and experimental investigation of a spherical cap dielectric elastomer actuator

Authors:
Thelemann, Albert; Hubracht, Andreas; Jiao, Chen; Tripathi, Ashwani Sharan; Marschner, Uwe; Richter, Andreas; Vorrath, E.−F.Markus; Maas, Juergen
145

Design of a Dielectric Waveguide Switch in High-Resistivity Silicon for THz Applications

Authors:
Burfeindt, Marcel Alver; Das, Paulami; Schmitt, Lisa; Hoffmann, Martin
146

Bolometer Sensors For Nuclear Fusion Devices

Authors:
Schaefer, S.; Schmitt, S.; Detemple, P.; Ingesson, L.C.; Penzel, F.; Meister, H.
147

Changes in molybdenum disilicide heating layers in miniaturized infra-red emitting devices caused by long term current stressing

Authors:
Baldauf, Julia; Mistry, Shimoni H.; Thronicke, Nicole; Schildhauer, Toni; Winzer, Andreas; Ortlepp, Thomas
148

Towards Wafer-Level Integration of Photonic Ultrasound Sensors in a SOI Platform

Authors:
Fuenning, Tabea; Manganelli, Costanza L.; Mai, Christian; Peczek, Anna; Kroh, Aleksandra; Villringer, Claus; Skibitzki, Oliver; Paul, Martin; Thomsen, Florian; Schumann, Christoph; Mai, Andreas; Steglich, Patrick