Quantification of Environmental Potentials of Microelectronics Production Processes - Green ICT @ FMD

Abstract:
Within the German Competence Center for Green ICT a major focus is making specific production processes greener or more sustainable. Approaches for greener processes cover using less of critical substances, substituting harmful substances completely or reducing energy and material consumption per output. On a secondary level, reducing overheads for cleaning and maintenance or the abatement of unavoidable emissions are important contributions. The lab scale of the Research Fab Microelectronics Germany (FMD) is close enough to industrial processes and equipment that achievable improvements can be quantified. Developments are focused on cleanroom equipment used for producing specialized semiconductor devices, or the back-end processes of advanced packaging. The approaches for measuring on the machine level and quantifying the environmental improvement on component and product level were refined in order to help companies speed up in their transition to greener operations.