Monolithically integrated tungsten masses for tuning of the resonance frequency of MEMS

Abstract:
The realization of high proof masses in MEMS devices can be beneficial for applications such as inertial sensors and mechanical oscillators. To achieve large masses within minimal wafer area, this study employs the PowderMEMS(r) microfabrication technology to monolithically integrate tungsten masses into MEMS structures on wafer level. Doubleclamped beam devices with a PowderMEMS(r) tungsten mass are fabricated and mechanically characterized. It is found that the eigenfrequency of devices with integrated tungsten mass is reduced by approximately 45%, in agreement with simulation results.