AlScN process platform for MEMS actuators with PZT like performance
Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany
doi:10.30420/456614047
Proceedings: MikroSystemTechnik Kongress 2025
Pages: 3Language: englishTyp: PDF
Authors:
Kreutzer, Tom-Niklas; Stoppel, Fabian; Ghori, Muhammad Zubair; Lofink, Fabian; Fichtner, Simon
Abstract:
This work presents a process platform for MEMS actuators based on the permanent polarization inversion in ferroelectric Aluminium-Scandium-Nitride (AlScN). By coupling multiple AlScN layers, deflections close to the performance of Lead-Zirconate-Titanate (PZT) can be reached while maintaining other advantageous properties of AlScN like its linearity and ability to be driven bipolarly.