On-chip Refractive Index Sensors in 200 mm Wafer Silicon Technology
Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany
doi:10.30420/456614049
Proceedings: MikroSystemTechnik Kongress 2025
Pages: 2Language: englishTyp: PDF
Authors:
Berkmann, Fritz; Reiter, Sebastian; Senguel, Akant; Mai, Christian; Chavarin, Carlos Alvarado; Wenger, Christian; Fischer, Inga Anita
Abstract:
We present electrooptical characterization results for Ge photodetectors with TiN nanohole arrays as miniaturized sensors for the detection of refractive index changes. Fabrication was carried out in cost-effective CMOS compatible 200 mm wafer Si technology.