A Finite Element Study of Electrode Configurations and Geometries for Electrostatic Stray Field Actuators

Abstract:
Common designs of electrostatic actuators in microelectromechanical systems rely on attracting forces and are often prone to instabilities. In contrast, so-called repulsive force actuators use stray fields and enable a more controlled actuation. Research on these actuators employs rather basic designs regarding electrode configuration and geometries. However, previous work has shown that slightly different configurations can drastically improve forces. This work aims to further explore electrode configurations and geometries for stray field actuators. A basic electrode configuration is parameterized and studied in three variations using finite element analysis. The resulting force-stroke curves demonstrate the potential for further optimization. In addition, the electric field strength along the electrode’s edge is studied to identify potential for homogenization and optimization.