Creation of biomimetic structures in functional glasses from biological surfaces by combining nanoimprinting and reactive ion etching

Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany

doi:10.30420/456614075

Proceedings: MikroSystemTechnik Kongress 2025

Pages: 3Language: englishTyp: PDF

Authors:
Nuesslein, Jakob; Weigel, Christoph; Mondal, Sagnik; Strehle, Steffen

Abstract:
Biological surfaces exhibit unique hierarchical structures that enable remarkable functionalities, which inspire a broad range of technical applications. However, replicating these complex 3D-structures efficiently and at scale remains challenging. In this study, we present an adaptable process combining NIL and RIE to transfer natural surface architectures into functional substrate materials. Using hydrophobic kohlrabi leaves as a demonstrative template, surface features were replicated via UV-assisted NIL onto a UV-curable resist on fused silica as an example of a functional material. Subsequent RIE enabled accurate, proportional transfer of the structures into the substrate. The process was verified through laser scanning microscopy and scanning electron microscopy, confirming successful reproduction of multi-level hierarchical features. This approach is scalable, efficient, and applicable to diverse natural templates and engineering materials, facilitating the integration of biological surface functionalities into micro- and nanotechnological applications