On the combination of pyrolysis and plasma to create Parylene C thin films

Abstract:
Pyrolysis for Parylene C deposition is a safe way to produce biocompatible hermetic thin films above 1 µm. For thin films below that thickness, the use of plasma is a well-researched process, but these films lack biocompatibility. With the combination of pyrolysis and Argon-plasma (30 W, 50 W), a new process was used to create Parylene C thin films and investigate thickness, Young’s Modulus, FTIR spectra, and the surface via SEM. The use of 50 W Argon-plasma shows an increase of thickness (1.6 µm) and Young’s Modulus (26.34 GPa) compared to pyrolysis (t=0.9 µm, E=7 GPa).