Realization and Mounting of Additively Manufactured 3D Structures on Diced Microsystem Chips using Material Jetting

Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany

doi:10.30420/456614080

Proceedings: MikroSystemTechnik Kongress 2025

Pages: 5Language: englishTyp: PDF

Authors:
Hauck, Lukas; Knechtel, Roy

Abstract:
This work is about a method of placing and fixing additively manufactured polymer structures on integrated micro systems for prototyping purposes. It describes the realization of an exemplary structure made of UV-photopolymerizable material using the mSLA process, the defined forming of adhesive intermediate layers by material jetting as well as the positioning and mounting of the components using pick & place.