Novel 3d Fabrication Method for Micro-Flame Ionization Detectors

Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany

doi:10.30420/456614092

Proceedings: MikroSystemTechnik Kongress 2025

Pages: 3Language: englishTyp: PDF

Authors:
Bohne, Sven; Lienerth, Peter; Trieu, Hoc Khiem

Abstract:
A novel 3d fabrication approach for a micro flame ionization detector (muFID) is presented. Many past muFID approaches are based on multilayer systems of ceramics or glass-silicon structures and functional thin layers of conductive and insu-lating materials deposited on them. The novel fabrication approach combines a 3d fabrication of the muFID body with easy to integrate needle shaped free standing electrodes to drastically reduce the temperature of electrode insulation materials and the electrode surface area in contact with the hot combustion chamber walls to reduce leakage currents. The separate manufacturing of muFID body and needle shaped free standing electrode makes the design highly adaptable.