Piezoelectrically driven MEMS cantilever-based sensors for gas detection

Abstract:
Gas sensors based on piezoelectrically driven MEMS cantilevers present a promising solution for the sensitive detection of volatile organic compounds, particularly in food freshness monitoring, such as meat and fish. The operational principle relies on the adsorption of gas molecules, which alters the cantilever's resonance frequency and deflection, allowing for quantification of gas concentration through a dynamic approach that employs an AC signal at the cantilever's resonance frequency. The fabrication of the MEMS sensors is performed on 200 mm wafers, followed by functionalization with a binder solution tailored for cadaverine. The fabrication steps are monitored inline, and a resonance frequency measurement can be conducted on wafer level. Simulation studies further refine the understanding of how the binder's weight affects resonance frequency, especially with a different cantilever thickness.