Strategies for Wavelength-Selective Ge Photodetectors in 200 mm Wafer Silicon Technology
Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany
doi:10.30420/456614102
Proceedings: MikroSystemTechnik Kongress 2025
Pages: 2Language: englishTyp: PDF
Authors:
Augel, Lion; Reiter, Sebastian; Senguel, Akant; Mai, Christian; Chavarin, Carlos Alvarado; Oleynik, Paul; Berkmann, Fritz; Wenger, Christian; Fischer, Inga Anita
Abstract:
The combination of Ge photodetectors with nanostructuring has great potential for applications in multispectral imaging in the range of “short-wave infrared” wavelengths (SWIR, 1100-1700 nm). We present strategies for realizing such components in cost-effective, CMOS-compatible 200 mm Si wafer technology.