Modeling of Piezoelectric Bistable MEMS

Abstract:
Bistable microelectromechanical systems (MEMS) offer design flexibility and low power consumption but pose modeling challenges due to both piezoelectric stress modulation and intrinsically nonlinear dynamics. This study applies the Galerkin method to solve the von Karman plate equation for a clamped silicon plate under uniform biaxial in-plane stress. Static deflection and vibrational eigenmodes are analyzed showing excellent agreement with finite element results. The method achieves high accuracy while reducing computational cost by a factor of 400 compared to the finite element method. These findings highlight the Galerkin method as an efficient tool for modeling bistable MEMS.