Development of a system for nanoscale tip-based 3D material deposition from the gas phase

Abstract:
3D printing technologies have become essential tools for manufacturing but remain insufficiently explored for the synthesis of nanostructures. In this work, we present the ongoing development of an experimental setup for tip-based electron beam-induced deposition (EBID) of nanostructures from the gas phase. In EBID, precursor molecules are decomposed through interactions with low-energy electrons, which are generated by field emission from a nanoscale tip in close vicinity to the substrate surface. Using EBID, carbon-based 3D nanostructures were already successfully fabricated. The new system offers in this regard a comprehensive parameter range, covering both, emission parameters and thermodynamic conditions of EBID and enables therefore new research opportunities.