Design, Simulation, and Fabrication of a MEMS-Based Electrostatic Microactuator for Precise Spherical Rotation

Abstract:
This study presents a novel MEMS-based electrostatic actuator system enabling precise, incremental rotation of a central sphere. The design features four independently controlled spherical actuators that tilt via asymmetric electrostatic forces, driving a stick–non-slip motion cycle. This allows fine angular positioning without relying on inertia. COMSOL Multiphysics simulations of electrostatic and mechanical behavior guided the design, which was fabricated using standard MEMS processes. Experimental validation confirms accurate tilt control.