MEMS tunable high-quality resonators for the THz range
Conference: MikroSystemTechnik KONGRESS 2025 - Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität
10/27/2025 - 10/29/2025 at Duisburg, Germany
doi:10.30420/456614136
Proceedings: MikroSystemTechnik Kongress 2025
Pages: 3Language: englishTyp: PDF
Authors:
Schmitt, Lisa; van der Herten, Jannis; Sanchez Pastor, Jesus; Jimenez-Saez, Alejandro; Hoffmann, Martin
Abstract:
This work focuses on the development of a frequency-tuneable high-Q resonator in the THz range for indoor localization. The system consists of two cavities with different resonance frequencies, one of which is mechanically shifted by an electrostatic actuator to precisely control the frequency difference. A capacitive measurement structure enables accurate detection of this displacement. The design incorporates measures for electromagnetic shielding. After fabrication, the system's functionality will be experimentally verified and compared with simulations.