Elektrostatischer Kammaktor fuer kombinierte Translation und Rotation

Abstract:
Electrostatic microactuators are divided into laterally/vertically moving and rotating systems. We present a concept for combining the three directions of movement using an electrostatic microactuator. For this purpose, horizontally and vertically offset comb drive actuators are used. An initial verification of the design is carried out based on FEM simulations. The additional degrees of freedom thus gained in motion control expand the application possibilities of electrostatic microactuators in micro-electromechanical systems (MEMS).