An Integrated MEMS Pressure-Flow Sensor for Real-Time Monitoring of Extracorporeal Circulatory Systems

Abstract:
In extracorporeal circulation systems, real-time hemodynamic monitoring is essential to ensure proper system operation and timely detection of device failures. However, existing pressure and flow monitoring devices are generally bulky, discrete and costly. This paper presents an integrated Micro-Electro-Mechanical Systems (MEMS) pressure-flow sensor for hemodynamic monitoring. Computational Fluid Dynamics (CFD) simulations and comparative experiments with commercial sensors demonstrate compliance with extracorporeal membrane oxygenation (ECMO) requirements, showing the differential pressure flow sensor accurately reflects circuit flow rate while integrating with the pressure monitoring system. The mean absolute error (MAE) of pressure measurement was 1.65 mmHg (20–140 mmHg range) with a flow rate MAE of 0.099 L/min (1–5 L/min range), providing a valuable reference for improving multi-parameter monitoring integration and reducing equipment costs in extracorporeal circulation systems.