1
CMOS-compatible fabrication of perforated membranes for filtration applications
Authors:
Brechmann, Noah; Michel, Marvin; Pickhinke, Andreas; Schierbaum, Nicolas; Seidl, Karsten
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
2
Comparative study of wafer-scale Al2O3 layers made by thermal and plasma-enhanced ALD
Authors:
Willeke, Leander; Jagosz, Julia; Gerke, Nils; Plate, Paul; Hoffmann, Martin; Bock, Claudia
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
3
Cu complex inks for printed electronics application-challenges and solutions
Authors:
Mohan, Nihesh; Saccon, Rodolfo; Bhogaraju, Sri Krishna; Elger, Gordon
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
4
Cu sintering for high power electronics packaging – challenges and solutions
Authors:
Saccon, Rodolfo; Bhogaraju, Sri Krishna; Elger, Gordon
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
5
Effective MEMS Manufacturing Using Vapor HF Etch Processing Illustrated by Means of a Sterilization Cycle Counter
Authors:
Baum, Norbert; Vora, Riddesh; Spies, Irina; Hoffmann, Daniel; Trautner, Heiko; Blattert, Christoph; Dehe, Alfons; Anderson, David; O'Hara, Tony
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
6
Elektrodenfeld für die zweidimensionale Charakterisierung nanostrukturierter Materialien
Authors:
Pliquett, Uwe; Gansauge, Chris; Echtermeyer, Danny
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
7
Erhöhung des Technologie-Reifegrades von Silicium-Gras zur Breitbandigen Entspiegelung von Siliciumoberflächen
Authors:
Hillebrand, Marius; Thewes, Anna Christina; Hoffmann, Martin; Bindel, Luisa; Isserstedt-Trinke, Annett; Biermann, Steffen; Gassner, Simon; Travan, Caterina; Glock, Ulrike
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
8
Fabrication of distributed Bragg reflectors to reduce coupling losses of photonic circuits
Authors:
Vermeer, Matthias L.; Alhareeb, Nadeem K.; Trieu, Hoc Khiem; Lipka, Timo
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
9
Glass-on-Glass Integrated Optofluidic Sensor based on a-Si:H Ring Resonators for Lab-on-Chip Applications
Authors:
Alhareeb, Nadeem K.; Vermeer, Matthias L.; Rennpferdt, Lukas; Trieu, Hoc Khiem; Lipka, Timo
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
10
Graphen/Cynanin-Farbstoff-basierte hochempfindliche flexible Photodetektoren
Authors:
Uzlu, Burkay; Stoll, Stefanie; Yakar, Ozan; Schneider, Daniel S.; Oezalp, Elif Merve; Neumaier, Daniel; Balci, Sinan; Wang, Zhenxing; Lemme, Max C.
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
11
Herstellung flexibler Foliensysteme durch Flip-Chip Bonden gedünnter Chips auf Kontaktpads mit Nanodrähten
Authors:
Albrecht, Bjoern; Passlack, Ulrike; Harendt, Christine; Weissenborn, Florian; Birlem, Olav; Quednau, Sebastian; Burghartz, Joachim. N.
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
12
Heterointegration von III-V basierten Resonanztunneldioden-Oszillatoren/Detektoren und Heterobipolartransistor-MMICs für kompakte THz Module
Authors:
Preuss, Christian; Kress, Robin; Mutlu, Enes; Mueller, Konrad; Possberg, Alexander; Prost, Werner; Weimann, Nils
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
13
In-plane thermal diffusivity measurement of Parylene C thin film with an RTD sensor array on a SiNx membrane
Authors:
Jiang, Felix; Schaller, Laura; Ryu, Meguya; Morikawa, Junko; Ingebrandt, Sven; Vu, Xuan Thang
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
14
Kompakter optischer Quantensensor basierend auf NV-Zentren in Diamant
Authors:
Baehr, Mario; Jahn, Martin; Heinze, Christoph; Neckermann, Kristin; Ortlepp, Thomas; Meijer, Jan
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
15
Large-area deposition of thin crystalline MoS2 films on 200 mm wafers using plasma-assisted atomic layer deposition.
Authors:
Jagosz, J.; Willeke, L.; Becher, M.; Ostendorf, A.; Plate, P.; Bock, C.
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
16
Laserinduzierte Verringerung des Metall-Graphen-Kontaktwiderstands
Authors:
Jangra, Vikas; Kataria, Satender; Lemme, Max C.
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
17
Membranbasierte Drucksensoren basierend auf Nanogranularen Tunnelwiderständen für medizinische Anwendungen
Authors:
Klein, Ann-Kathrin; Goschurny, Thomas; Bieschke, Pascal; Kaya, Alexander
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
18
Miniaturisierte kapazitive Feldeffekt-Sensoren mit atomlagenabgeschiedenem Ta2O5 auf ultradünnen Isolatoren
Authors:
Iken, Heiko; Johnen, Anna Lynn; Molinnus, Denise; Richstein, Benjamin; Hellmich, Lena; Poghossian, Arshak; Knoch, Joachim; Schoening, Michael J.
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
19
Modellbasiertes Reaktives Fügen
Authors:
Belguanche, Amal; Schumacher, Axel; Desch, Nikolai; Benachour, Abdulmonaim; Boettcher, Julius; Dietrich, Georg; Pflug, Erik; Spies, Irina; Meyer, Peter; Folkmer, Bernd; Knappmann, Stephan; Farber, Peter; Graebel, Jens; Lake, Markus; Dehe, Alfons
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop
20
Modellierung und Experimente von Gold-Nanopartikel-modifizierten Feldeffektstrukturen
Authors:
Karschuck, Tobias; Poghossian, Arshak; Wagner, Patrick H.; Schoening, Michael J.
Conference:
Mikro-Nano-Integration - 9. GMM-Workshop